High aspect-ratio micromachining of polymers with an ultrafast laser
Identifieur interne : 00B703 ( Main/Exploration ); précédent : 00B702; suivant : 00B704High aspect-ratio micromachining of polymers with an ultrafast laser
Auteurs : Y. Zhang [Japon] ; R. M. Lowe [Australie] ; E. Harvey [Australie] ; P. Hannaford [Australie] ; A. Endo [Japon]Source :
- Applied surface science [ 0169-4332 ] ; 2002.
Descripteurs français
Abstract
Laser ablation of various polymers has been studied using a beam of 100 fs laser pulses at a wavelength of 800 nm. For a beam focussed by a plano-convex lens, high-quality machining of holes with diameters 20-40 μm and depths 300-400 μm (aspect ratio greater than 10) has been achieved. When projection patterning is carried out with a rectangular pinhole, arrays of micro-strings have been observed deep in the bulk of the sample. The micro-strings have diameters as small as 2 μm (about three times the wavelength) and lengths greater than 10 mm (aspect ratio 5000). The achievement of the high aspect ratios and the formation of the arrays of micro-strings are discussed.
Affiliations:
Links toward previous steps (curation, corpus...)
- to stream PascalFrancis, to step Corpus: 005785
- to stream PascalFrancis, to step Curation: 000954
- to stream PascalFrancis, to step Checkpoint: 005399
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- to stream Main, to step Curation: 00B703
Le document en format XML
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<front><div type="abstract" xml:lang="en">Laser ablation of various polymers has been studied using a beam of 100 fs laser pulses at a wavelength of 800 nm. For a beam focussed by a plano-convex lens, high-quality machining of holes with diameters 20-40 μm and depths 300-400 μm (aspect ratio greater than 10) has been achieved. When projection patterning is carried out with a rectangular pinhole, arrays of micro-strings have been observed deep in the bulk of the sample. The micro-strings have diameters as small as 2 μm (about three times the wavelength) and lengths greater than 10 mm (aspect ratio 5000). The achievement of the high aspect ratios and the formation of the arrays of micro-strings are discussed.</div>
</front>
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